microelectromechanical system
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English[edit]
Etymology[edit]
microelectromechanical + system
Noun[edit]
microelectromechanical system (plural microelectromechanical systems)
- an electromechanical system composed of micron-sized components (of the range 1μm–100μm) in a millimetre-sized system (of the range 0.02mm–1mm)